Selective epitaxial growth of by metal-organic vapour-phase epitaxy

Koji Shimoyama; Yuichi Inoue; Katsushi Fujii; Hideki Gotoh

doi:10.1016/0921-5107(93)90077-z

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Selective epitaxial growth of by metal-organic vapour-phase epitaxy

Koji Shimoyama Yuichi Inoue Katsushi Fujii Hideki Gotoh

Year: 1993 Journal: Materials Science and Engineering B Vol: 17 (1-3)Pages: 29-33 Publisher: Elsevier BV

DOI: 10.1016/0921-5107(93)90077-z

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Keywords:

Epitaxy Selectivity Passivation Dangling bond Supersaturation Metal Chemistry Inorganic chemistry Phase (matter) Diffusion Catalysis Materials science Hydrogen Organic chemistry Thermodynamics

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Selective epitaxial growth of by metal-organic vapour-phase epitaxy

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