JOURNAL ARTICLE

Ionic properties of ultrathin yttria-stabilized zirconia thin films fabricated by atomic layer deposition with water, oxygen, and ozone

Keywords:
Yttria-stabilized zirconia X-ray photoelectron spectroscopy Atomic layer deposition Materials science Thin film Cubic zirconia Analytical Chemistry (journal) Dielectric spectroscopy Ionic conductivity Conductivity Chemical engineering Inorganic chemistry Chemistry Nanotechnology Ceramic Composite material Physical chemistry Electrode Electrochemistry Organic chemistry

Metrics

17
Cited By
1.05
FWCI (Field Weighted Citation Impact)
23
Refs
0.75
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advancements in Solid Oxide Fuel Cells
Physical Sciences →  Materials Science →  Materials Chemistry
Electronic and Structural Properties of Oxides
Physical Sciences →  Materials Science →  Materials Chemistry
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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