Ion Conduction in Nanoscale Yttria-Stabilized Zirconia Thin Films Fabricated by Atomic Layer Deposition

Kyung Sik Son; Minyong Bae; Kiho Bae; Jeongsuk Ha; Joon Hyung Shim

doi:10.1149/ma2012-02/16/1892

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Ion Conduction in Nanoscale Yttria-Stabilized Zirconia Thin Films Fabricated by Atomic Layer Deposition

Kyung Sik Son Minyong Bae Kiho Bae Jeongsuk Ha Joon Hyung Shim

Year: 2012 Journal: ECS Meeting Abstracts Vol: MA2012-02 (16)Pages: 1892-1892 Publisher: Institute of Physics

DOI: 10.1149/ma2012-02/16/1892

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Abstract

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Keywords:

Nanoscopic scale Materials science Yttria-stabilized zirconia Layer (electronics) Atomic layer deposition Cubic zirconia Thin film Deposition (geology) Ion Nanotechnology Thermal conduction Composite material Chemistry Ceramic Geology

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Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Advancements in Solid Oxide Fuel Cells

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ion Conduction in Nanoscale Yttria-Stabilized Zirconia Thin Films Fabricated by Atomic Layer Deposition

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