BOOK-CHAPTER
Transport Properties of Plasma Enhanced CVD Silicon Oxynitride Films
Keywords:
Silicon oxynitride Plasma-enhanced chemical vapor deposition Materials science Silicon Electric field Plasma Chemical vapor deposition Analytical Chemistry (journal) Silicon oxide Optoelectronics Chemistry Silicon nitride
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Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
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