JOURNAL ARTICLE
Investigation of diamond etching by a microwave plasma-assisted system
Keywords:
Microwave Etching (microfabrication) Diamond Process (computing) Quality (philosophy)
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Topics
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
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