JOURNAL ARTICLE

Microwave plasma-assisted etching of diamond

Dzung T. TranT.A. GrotjohnD.K. ReinhardJ. Asmussen

Year: 2008 Journal:   Diamond and Related Materials Vol: 17 (4-5)Pages: 717-721   Publisher: Elsevier BV
Keywords:
Diamond Etching (microfabrication) Electron cyclotron resonance Microwave Reactive-ion etching Argon Plasma Materials science Plasma etching Analytical Chemistry (journal) Microwave cavity Ion source Synthetic diamond Crystallite Dry etching Crystal (programming language) Torr Chemistry Nanotechnology Composite material Metallurgy

Metrics

29
Cited By
1.66
FWCI (Field Weighted Citation Impact)
10
Refs
0.84
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
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