Microwave plasma-assisted etching of diamond

Dzung T. Tran; T.A. Grotjohn; D.K. Reinhard; J. Asmussen

doi:10.1016/j.diamond.2007.12.067

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JOURNAL ARTICLE

Microwave plasma-assisted etching of diamond

Dzung T. Tran T.A. Grotjohn D.K. Reinhard J. Asmussen

Year: 2008 Journal: Diamond and Related Materials Vol: 17 (4-5)Pages: 717-721 Publisher: Elsevier BV

DOI: 10.1016/j.diamond.2007.12.067

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Keywords:

Diamond Etching (microfabrication) Electron cyclotron resonance Microwave Reactive-ion etching Argon Plasma Materials science Plasma etching Analytical Chemistry (journal) Microwave cavity Ion source Synthetic diamond Crystallite Dry etching Crystal (programming language) Torr Chemistry Nanotechnology Composite material Metallurgy

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1.66

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0.84

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Citation History

Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Microwave plasma-assisted etching of diamond

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Citation History

Topics

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