JOURNAL ARTICLE

Tabletop Fabrication of High-Performance MoS<sub>2</sub> Field-Effect\nTransistors

Ungrae Cho (12858542)Seokjin Kim (4102711)Chang Yeop Shin (12858545)Intek Song (1920301)

Year: 2022 Journal:   OPAL (Open@LaTrobe) (La Trobe University)   Publisher: La Trobe University

Abstract

A simple way to prepare\nfield-effect transistors (FETs) using MoS<sub>2</sub> on tabletop\nis presented. Conductive silver paste was applied\nonto chemical vapor deposition (CVD)-grown MoS<sub>2</sub> as Ohmic-contact\nelectrodes. Heating the device in vacuum further enhances the performance\nwithout damage. The final performance is comparable to that of the\nSiO<sub>2</sub>-backgated devices prepared by lithography and metal\nevaporators. The role of the silver paste and heat treatment in vacuum\nis investigated by device and spectroscopic analysis.

Keywords:
Fabrication Lithography Chemical vapor deposition Electrical conductor Photolithography Deposition (geology) Vacuum deposition

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Topics

2D Materials and Applications
Physical Sciences →  Materials Science →  Materials Chemistry
Nanowire Synthesis and Applications
Physical Sciences →  Engineering →  Biomedical Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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