BOOK-CHAPTER
Selective Chemical Vapor Deposition
Keywords:
Chemical vapor deposition Epitaxy Substrate (aquarium) Nucleation Materials science Deposition (geology) Layer (electronics) Dielectric Etching (microfabrication) Silicon Nanotechnology Selectivity Optoelectronics Chemical engineering Chemistry Catalysis Organic chemistry Geology
Metrics
5
Cited By
0.00
FWCI (Field Weighted Citation Impact)
32
Refs
0.03
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advancements in Semiconductor Devices and Circuit Design
Physical Sciences → Engineering → Electrical and Electronic Engineering
nanoparticles nucleation surface interactions
Physical Sciences → Earth and Planetary Sciences → Atmospheric Science
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