JOURNAL ARTICLE
Selective Chemical Vapor Deposition of Aluminum
Keywords:
Materials science Chemical vapor deposition Aluminium Nanotechnology Deposition (geology) Chemical engineering Combustion chemical vapor deposition Optoelectronics Metallurgy Thin film Carbon film
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FWCI (Field Weighted Citation Impact)
0
Refs
0.30
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Citation History
Topics
Electrohydrodynamics and Fluid Dynamics
Physical Sciences → Engineering → Electrical and Electronic Engineering
Aluminum Alloy Microstructure Properties
Physical Sciences → Engineering → Aerospace Engineering
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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