JOURNAL ARTICLE
Stainless steel diaphragm-based piezoresistive pressure sensor
Linet Thomas ChiranackalJitthu JosephPavithra BelthangadyKiran KumarVijay KumarJaspreet SinghM. M. Nayak
Year: 2025 Journal: Microsystem Technologies Vol: 31 (12)Pages: 3993-4002 Publisher: Springer Science+Business Media
Keywords:
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Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences → Engineering → Biomedical Engineering
Sensor Technology and Measurement Systems
Physical Sciences → Computer Science → Computer Networks and Communications
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