Development of SAW pressure sensor using stainless steel diaphragm

Abstract

Summary form only given. A frequency output pressure sensor based on surface acoustic wave (SAW) technology was developed. SAW pressure sensors were developed using stainless steel (AISI-630) diaphragms on which SAW resonators are directly fabricated; these sensors' basic characteristics were estimated. The novel SAW pressure sensor consists of a stainless steel diaphragm, an insulating film (SiO/sub 2/:2 mu m thick), a piezoelectric film (ZnO: 20 mu m thick), electrodes (Al: 1000 AA thick), and electronic circuits. At present, the temperature characteristics of the sensors are not good, but it is expected that the sensors will have more accuracy by using temperature-compensating mechanisms.< >