Practical Approach Design Piezoresistive Pressure Sensor in Circular Diaphragm

Abstract

This paper presents a methodology for analytical calculation and computational simulation using the finite element method for piezoresistive graphite sensor element on flexible polymer substrate, A4 paper.The computer simulation aims to find the region of greatest mechanical tension and deflection of the circular diaphragm set in the circumference edges.The steps for simulation are geometry definition, mesh generation, inclusion of material physical properties and simulation execution.The mathematical modeling of maximum mechanical stress and deflection is described analytically and computationally.The analytical calculations were compared with the computer simulation and presented a relative percentage error of 3.38% for the maximum deflection.The results show that the piezoresistor should be positioned at the edges of the circular diaphragm to take advantage of maximum mechanical stress by defining the best location for graphite film deposition for sensor device designs and fabrications.