Design of diaphragm structure for piezoresistive pressure sensor using topology optimization

Benliang Zhu; Xianmin Zhang; Yanzhen Zhang; Sergej Fatikow

doi:10.1007/s00158-016-1470-x

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Design of diaphragm structure for piezoresistive pressure sensor using topology optimization

Benliang Zhu Xianmin Zhang Yanzhen Zhang Sergej Fatikow

Year: 2016 Journal: Structural and Multidisciplinary Optimization Vol: 55 (1)Pages: 317-329 Publisher: Springer Science+Business Media

DOI: 10.1007/s00158-016-1470-x

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Keywords:

Topology optimization Diaphragm (acoustics) Engineering design process Piezoresistive effect Topology (electrical circuits) Pressure sensor Computer science Engineering Mechanical engineering Materials science Structural engineering Electrical engineering Finite element method

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Topology Optimization in Engineering

Physical Sciences → Engineering → Civil and Structural Engineering

Composite Structure Analysis and Optimization

Physical Sciences → Engineering → Mechanics of Materials

Piezoelectric Actuators and Control

Physical Sciences → Engineering → Control and Systems Engineering

Design of diaphragm structure for piezoresistive pressure sensor using topology optimization

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