Piezoelectric MEMS-Based Sensors and Actuators

BOOK-CHAPTER

Year: 2025 Pages: 101-114

DOI: 10.1201/9781003541370-7

Keywords:

Microelectromechanical systems Actuator Piezoelectricity Materials science Computer science Engineering Electrical engineering Optoelectronics

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0.61

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications