BOOK-CHAPTER
Piezoelectric MEMS for Sensors, Actuators and Energy Harvesting
Alessandro NastroMarco BaùMarco FerrariVittorio Ferrari
Year: 2022 Lecture notes in electrical engineering Pages: 264-270 Publisher: Springer Science+Business Media
Keywords:
Microelectromechanical systems Piezoelectricity Energy harvesting Actuator PMUT Transducer Acoustics Materials science Mechanical energy Energy (signal processing) Electrical engineering Electronic engineering Engineering Optoelectronics Physics
Metrics
3
Cited By
2.16
FWCI (Field Weighted Citation Impact)
14
Refs
0.84
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Microfluidic and Bio-sensing Technologies
Physical Sciences → Engineering → Biomedical Engineering
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