MEMS-based microsensors using piezoelectric thin films as sensors and actuators

Takeshi Kobayashi; Hironao Okada; Natsumi Makimoto; S. Oyama; Hiroshi Funakubo; Tohishiro Itoh; Ryutaro Maeda

doi:10.1007/978-3-319-11340-1_4

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MEMS-based microsensors using piezoelectric thin films as sensors and actuators

Takeshi Kobayashi Hironao Okada Natsumi Makimoto S. Oyama Hiroshi Funakubo Tohishiro Itoh Ryutaro Maeda

Year: 2014 Pages: 37-47

DOI: 10.1007/978-3-319-11340-1_4

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Keywords:

Materials science Microelectromechanical systems Thin film Microfabrication Piezoelectricity Actuator Voltage Optoelectronics Electronic engineering Electrical engineering Nanotechnology Composite material Fabrication Engineering

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

MEMS-based microsensors using piezoelectric thin films as sensors and actuators

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