JOURNAL ARTICLE

A parametrically excited MEMS gyroscope with optical readout: Design and simulation

Keywords:
Gyroscope Microelectromechanical systems Excited state Vibrating structure gyroscope Physics Ring laser gyroscope Optics Optoelectronics Atomic physics Quantum mechanics

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Topics

Photonic and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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