JOURNAL ARTICLE
A parametrically excited MEMS gyroscope with optical readout: Design and simulation
Reza GholamzadehMohammadreza Salehi MoghaddamHassan SalariehJavad AkbariGholam-Mohammad Parsanasab
Year: 2025 Journal: Precision Engineering Vol: 96 Pages: 814-821 Publisher: Elsevier BV
Keywords:
Gyroscope Microelectromechanical systems Excited state Vibrating structure gyroscope Physics Ring laser gyroscope Optics Optoelectronics Atomic physics Quantum mechanics
Metrics
0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
28
Refs
0.29
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Related Documents
JOURNAL ARTICLE
A Parametrically Amplified MEMS Gyroscope
Barry J. GallacherZhongxu HuJ.S. BurdessK M Harish
Journal: Additional Conferences (Device Packaging HiTEC HiTEN & CICMT) Year: 2010 Vol: 2010 (DPC)Pages: 001322-001334
JOURNAL ARTICLE
Numerical Simulation of Parametrically Excited Bistable MEMS Plates
Journal: reposiTUm (TU Wien) Year: 2022
JOURNAL ARTICLE
A parametrically amplified MEMS rate gyroscope
Zhongxu HuBarry J. GallacherJ.S. BurdessC.P. FellKevin R. Townsend
Journal: Sensors and Actuators A Physical Year: 2011 Vol: 167 (2)Pages: 249-260
BOOK-CHAPTER
Parametrically Excited MEMS-Based Filters
Steven W. ShawKimberly L. TurnerJeffrey F. RhoadsRajashree Baskaran
Solid mechanics and its applications Year: 2005 Pages: 137-146