BOOK-CHAPTER
Parametrically Excited Nonlinear MEMS Resonators
Keywords:
Microelectromechanical systems Resonator Excited state Nonlinear system Physics Materials science Optoelectronics Atomic physics Quantum mechanics
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Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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