Enhancing Chaos Immunity of a Vibrating MEMS Based on Parametrically Excited Mode-Localized Resonators

Abstract

Abstract Microelectromechanical system (MEMS) sensors using mode localization effects have excellent sensitivity, but are still susceptible to ambient noise in practical applications, which can lead to chaotic vibration of the resonator. This study establishes a parametrically excited mode-localized structure model based on Euler-Bernoulli beam theory, which is solved using the Galerkin discretization and Runge-Kutta numerical integration. Systematic investigations focus on the impact of electrode-resonator gap symmetry on chaos immunity, with largest Lyapunov exponent mapping employed to quantify chaotic tendencies. The numerical results demonstrate that strategically breaking gap symmetry enhances chaos immunity by about 24.56% compared to symmetric configurations, effectively suppressing chaotic vibration.