Efficient white light interferometry for wafer‑scale high aspect ratio structures

Weihao Zhang; Hangying Zhang; Baoyi Wang; Kai Meng; Peihuang Lou

doi:10.1016/j.measurement.2025.117988

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JOURNAL ARTICLE

Efficient white light interferometry for wafer‑scale high aspect ratio structures

Weihao Zhang Hangying Zhang Baoyi Wang Kai Meng Peihuang Lou

Year: 2025 Journal: Measurement Vol: 255 Pages: 117988-117988 Publisher: Elsevier BV

DOI: 10.1016/j.measurement.2025.117988

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Keywords:

Wafer White light interferometry Interferometry Optics White light Materials science Scale (ratio) Wafer-scale integration Optoelectronics Chip-scale package Aspect ratio (aeronautics) Physics

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Topics

Optical measurement and interference techniques

Physical Sciences → Computer Science → Computer Vision and Pattern Recognition

Industrial Vision Systems and Defect Detection

Physical Sciences → Engineering → Industrial and Manufacturing Engineering

Surface Roughness and Optical Measurements

Physical Sciences → Engineering → Computational Mechanics

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