JOURNAL ARTICLE

Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography

Keywords:
Wafer Etching (microfabrication) Lithography Materials science Miniaturization Plasma etching Reactive-ion etching Deep reactive-ion etching Machining Photoresist Photolithography Optoelectronics Silicon Aspect ratio (aeronautics) Plasma Nanotechnology Metallurgy

Metrics

13
Cited By
0.85
FWCI (Field Weighted Citation Impact)
30
Refs
0.67
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Nanowire Synthesis and Applications
Physical Sciences →  Engineering →  Biomedical Engineering
3D IC and TSV technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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