JOURNAL ARTICLE
Three-Dimensional Proximity Effect Correction in Electron Beam Lithography
Keywords:
Electron-beam lithography Lithography Stencil lithography Cathode ray X-ray lithography Proximity effect (electron beam lithography) Next-generation lithography Maskless lithography Materials science Electron Optics Resist Optoelectronics Physics Nanotechnology Nuclear physics
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FWCI (Field Weighted Citation Impact)
15
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0.21
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Topics
Advancements in Photolithography Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
Optical Coatings and Gratings
Physical Sciences → Materials Science → Surfaces, Coatings and Films
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