JOURNAL ARTICLE

Fabrication of grooves on 4H–SiC using femtosecond laser vector beam

Jia-Fan KuoChung‐Wei Cheng

Year: 2024 Journal:   Optics Communications Vol: 574 Pages: 131200-131200   Publisher: Elsevier BV
Keywords:
Femtosecond Optics Materials science Fabrication Laser Laser beams Beam (structure) Optoelectronics Physics

Metrics

3
Cited By
2.16
FWCI (Field Weighted Citation Impact)
24
Refs
0.78
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
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