Micromachining of 4H-SiC using femtosecond laser

Ru Zhang; Chuanzhen Huang; Jun Wang; Hongtao Zhu; Peng Yao; Shaochuan Feng

doi:10.1016/j.ceramint.2018.06.245

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Micromachining of 4H-SiC using femtosecond laser

Ru Zhang Chuanzhen Huang Jun Wang Hongtao Zhu Peng Yao Shaochuan Feng

Year: 2018 Journal: Ceramics International Vol: 44 (15)Pages: 17775-17783 Publisher: Elsevier BV

DOI: 10.1016/j.ceramint.2018.06.245

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Keywords:

Materials science Femtosecond Surface micromachining Laser Silicon carbide Surface roughness Silicon Surface finish Groove (engineering) Optics Optoelectronics Composite material Metallurgy Fabrication

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Micromachining of 4H-SiC using femtosecond laser

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