Femtosecond laser micromachining in combination with ICP etching for 4H–SiC pressure sensor membranes

Lukang Wang; You Zhao; Zixuan Yang; Yulong Zhao; Xinwan Yang; Taobo Gong; Cun Li

doi:10.1016/j.ceramint.2020.10.220

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Femtosecond laser micromachining in combination with ICP etching for 4H–SiC pressure sensor membranes

Lukang Wang You Zhao Zixuan Yang Yulong Zhao Xinwan Yang Taobo Gong Cun Li Taobo Gong Cun Li

Year: 2020 Journal: Ceramics International Vol: 47 (5)Pages: 6397-6408 Publisher: Elsevier BV

DOI: 10.1016/j.ceramint.2020.10.220

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Keywords:

Materials science Femtosecond Laser Surface micromachining Etching (microfabrication) Fluence Surface roughness Membrane Inductively coupled plasma Optics Optoelectronics Raman spectroscopy Plasma Fabrication Nanotechnology Composite material Layer (electronics)

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Silicon Carbide Semiconductor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Femtosecond laser micromachining in combination with ICP etching for 4H–SiC pressure sensor membranes

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