Efficient fabrication of high-quality hybrid periodic nanostructures on 4H-SiC using a single-step vector femtosecond laser processing

JOURNAL ARTICLE

Year: 2024 Journal: Optics & Laser Technology Vol: 179 Pages: 111363-111363 Publisher: Elsevier BV

DOI: 10.1016/j.optlastec.2024.111363

Keywords:

Femtosecond Fabrication Materials science Nanostructure Laser Optoelectronics Quality (philosophy) Nanotechnology Optics Physics

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Surface Polishing Techniques

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High-Temperature Coating Behaviors

Physical Sciences → Engineering → Aerospace Engineering