300-mm monolithic CMOS silicon photonics foundry technology [Invited]
Yusheng BianTakako HirokawaWon Suk LeeSujith ChandranKen GiewontAbdelsalam AboketafQidi LiuRyan SporerMichał RakowskiKevin DezfulianMing GongArman NajafiChris RitchieJae-Kyu ChoMassimo SorbaraThomas HoughtonYarong LinMichelle ZhangShenghua SongHelen WongZahidur ChowdhuryArpan DasguptaFarid BarakatJason KimKate McLeanHanyi DingJingyu WuRongtao CaoFahimeh BanihashemianSalman MoslehF. BeaudoinRyan GallagherBrian PopielarskiPrateek Kumar SharmaFrancis O. AfzalMohamed GheithIan StobertMini Modh GhosalPrashanth R. PrasadRanjani SirdeshmukhJanet TinklerTeck-Jung TangFrederick G. AndersonNorm RobsonSeungman ChoiAndrea PaganiniFen JaminVaibhav RupareliaJae Gon LeeIan MelvilleGeorge GiffordV. B. GuptaAnthony W. YuIsabelle FerainTed Letavic
Abstract
This paper reviews recent advancements in GlobalFoundries (GF) Fotonix TM technology: a 300-mm monolithic CMOS silicon photonics (SiPh) foundry platform. The discussion encompasses photonic and CMOS device libraries, advanced packaging, PDK compact models, reliability, and system-level demonstrations.
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