Overload Capability Design of MEMS Polycrystalline Silicon Nano-Diaphragm Pressure Sensors

Fumin Xiong; Yuxin Xi; Zhangbin Feng

doi:10.1109/icmtim62047.2024.10629422

ScienceGate Book Chapters

JOURNAL ARTICLE

Overload Capability Design of MEMS Polycrystalline Silicon Nano-Diaphragm Pressure Sensors

Fumin Xiong Yuxin Xi Zhangbin Feng

Year: 2024 Pages: 214-218

DOI: 10.1109/icmtim62047.2024.10629422

Get Full-Text PDF Get Analytical Report

Keywords:

Microelectromechanical systems Materials science Silicon Diaphragm (acoustics) Polycrystalline silicon Pressure sensor Nano- Nanotechnology Optoelectronics Composite material Electrical engineering Mechanical engineering Engineering

Metrics

Cited By

0.00

FWCI (Field Weighted Citation Impact)

Refs

0.11

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Overload Capability Design of MEMS Polycrystalline Silicon Nano-Diaphragm Pressure Sensors

Metrics

Topics

Related Documents

Design Considerations for Silicon Circular Diaphragm Pressure Sensors

Design & analysis of diaphragm for MEMS based pressure sensors

Silicon Diaphragm Pressure Sensors With Integrated Electronics.

Design and optimization of a novel diaphragm structure for MEMS piezoresistive pressure sensors

Piezoresistive pressure sensors based on polycrystalline silicon