JOURNAL ARTICLE

Overload Capability Design of MEMS Polycrystalline Silicon Nano-Diaphragm Pressure Sensors

Keywords:
Microelectromechanical systems Materials science Silicon Diaphragm (acoustics) Polycrystalline silicon Pressure sensor Nano- Nanotechnology Optoelectronics Composite material Electrical engineering Mechanical engineering Engineering

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Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering

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