JOURNAL ARTICLE
Design & analysis of diaphragm for MEMS based pressure sensors
Vishal C. ThakarBhakti N. PatelP.K. Karsh
Year: 2022 Journal: Materials Today Proceedings Vol: 65 Pages: 3683-3687 Publisher: Elsevier BV
Keywords:
Diaphragm (acoustics) Square (algebra) Microelectromechanical systems Displacement (psychology) Rectangle Structural engineering Materials science von Mises yield criterion Pressure sensor Acoustics Engineering Mechanical engineering Mathematics Geometry Physics Vibration Finite element method Nanotechnology
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Topics
Nonlocal and gradient elasticity in micro/nano structures
Physical Sciences → Materials Science → Materials Chemistry
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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