MEMS-Based Pressure Sensors

Abstract

Pressure sensors such as absolute pressure sensor, gauge pressure sensor, vacuum pressure sensor, differential pressure sensor, and sealed pressure sensor are devices that convert pressure to physical movement with subsequent transformation into electrical signal or other output. Thus, a standardized pressure transmitter consists of three basic components: a pressure transducer, its power supply, and a signal conditioner/retransmitter that converts the transducer signal into a standardized output (Eaton and Smith 1997). Pressure sensors are now widely used for aerospace, biomedical, automobile, defense, and consumer applications (Tandeske 1991; Puers 1993; Judy 2001; Ripka and Tipek 2007).