Low voltage micro electro mechanical systems gas sensor for smart industrial smart applications

JOURNAL ARTICLE

Year: 2024 Journal: AIP conference proceedings Vol: 3122 Pages: 090005-090005 Publisher: American Institute of Physics

DOI: 10.1063/5.0215937

Keywords:

Voltage Intelligent sensor Low voltage Materials science Computer science Electrical engineering Embedded system Engineering Wireless sensor network

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Chemical Sensor Technologies

Physical Sciences → Engineering → Biomedical Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering