Membrane Micro Electro-Mechanical Systems for Industrial Applications

Abstract

The objective of this chapter is to provide the analytical-numerical tools for the simplified rewriting of the most important mathematical models of MEMS membrane devices for Mechatronics, exploiting advanced concepts and results in the theory of curves and surfaces. Moreover, when the solution in closed form could not be obtained (that is, it is impossible to obtain the membrane deflection analytically), some consolidated techniques will be described both to obtain conditions ensuring existence/uniqueness of the solution, and the most suitable approaches for obtaining numerical solutions in the absence of ghost solutions. Finally, some practical examples will illustrate the approaches presented.