Micro-Electro-Mechanical-Systems and Industrial Applications

Abstract

Abstract This paper gives an overview of Micro-Electro-Mechanical devices that are in the industrial stage for application in the automotive and the communication industry. We present a monolitic integrated pressure sensor, a massflow sensor and a monolithic integrated acceleration sensor. Also introduced is a novel process for surface micromachining which is offered as a foundry service to companies and universities. In the second part important optoelectrical components for the optical path network will be presented.