Ultra-Low Loss Silicon Nitride Waveguides on Monolithic Integrated Photonics Circuits for a Mature 300 mm Wafer Scale Silicon Photonics Platform

Yukta Timalsina; Gerald Leake; T. Ngai; Alin Antohe; Siti K. Binti; Christopher Baiocco; Nicholas M. Fahrenkopf; D.L. Harame

doi:10.1364/cleo_at.2023.am4m.7

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Ultra-Low Loss Silicon Nitride Waveguides on Monolithic Integrated Photonics Circuits for a Mature 300 mm Wafer Scale Silicon Photonics Platform

Yukta Timalsina Gerald Leake T. Ngai Alin Antohe Siti K. Binti Christopher Baiocco Nicholas M. Fahrenkopf D.L. Harame

Year: 2023 Vol: 106 Pages: AM4M.7-AM4M.7

DOI: 10.1364/cleo_at.2023.am4m.7

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Abstract

We demonstrate silicon nitride waveguides with <0.1 and 0.3 dB/cm loss in nitride and fully integrated photonics wafers, respectively, by employing noble integration techniques while preserving the performance of the other devices of the platform.

Keywords:

Photonics Silicon photonics Wafer Silicon nitride Materials science Optoelectronics Photonic integrated circuit Hybrid silicon laser Wafer-scale integration Silicon Integration platform Nitride Integrated circuit Nanotechnology Computer science

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Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Fiber Laser Technologies

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Photonic Communication Systems

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ultra-Low Loss Silicon Nitride Waveguides on Monolithic Integrated Photonics Circuits for a Mature 300 mm Wafer Scale Silicon Photonics Platform

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