Ultra Low-Loss Silicon Waveguides for 200 mm Photonics Platform

Quentin Wilmart; Karen Ribaud; Philippe Grosse; Benoı̂t Charbonnier; Stéphane Bernabé; Corrado Sciancalepore; E. Pargon; Bertrand Szelag; Cyril Bellegarde; Camille Petit‐Etienne; Laurène Youssef; Jean-Michel Hartmann; Daivid Fowler; S. Brision; S. Garcia; A. Myko

doi:10.1109/group4.2019.8925610

JOURNAL ARTICLE

Ultra Low-Loss Silicon Waveguides for 200 mm Photonics Platform

Quentin Wilmart Karen Ribaud Philippe Grosse Benoı̂t Charbonnier Stéphane Bernabé Corrado Sciancalepore E. Pargon Bertrand Szelag Cyril Bellegarde Camille Petit‐Etienne Laurène Youssef Jean-Michel Hartmann Daivid Fowler S. Brision S. Garcia A. Myko

Year: 2019 Pages: 1-2

DOI: 10.1109/group4.2019.8925610

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Abstract

We demonstrate ultra-low optical losses in silicon waveguide by applying a smoothing annealing with no morphological deformation. We reach record-low losses at 1310nm with 0.1 dB/cm in single mode waveguide, while the performances of the other devices of the platform are preserved.

Keywords:

Silicon photonics Silicon Materials science Waveguide Photonics Annealing (glass) Optoelectronics Optics Integrated optics Physics Composite material

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Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Fiber Laser Technologies

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Photonic Communication Systems

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ultra Low-Loss Silicon Waveguides for 200 mm Photonics Platform

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