Structure and electrical conductivity of nanocomposite SiOxNy(Si) and SiAlzOxNy(Si) films

А.А. Еvtukh; Anatoliy Kizjak; O.L. Bratus; M. Voitovych; V. R. Romanyuk; S.V. Mamykin; S. Antonin; Ya. Muriy; Vladyslav Anatoliiovych Klymenko; Andrey Sarikov

doi:10.1016/j.jallcom.2023.170879

JOURNAL ARTICLE

Structure and electrical conductivity of nanocomposite SiOxNy(Si) and SiAlzOxNy(Si) films

А.А. Еvtukh Anatoliy Kizjak O.L. Bratus M. Voitovych V. R. Romanyuk S.V. Mamykin S. Antonin Ya. Muriy Vladyslav Anatoliiovych Klymenko Andrey Sarikov

Year: 2023 Journal: Journal of Alloys and Compounds Vol: 960 Pages: 170879-170879 Publisher: Elsevier BV

DOI: 10.1016/j.jallcom.2023.170879

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Keywords:

Materials science Annealing (glass) Amorphous solid Electrical resistivity and conductivity Nanocomposite Sputtering Analytical Chemistry (journal) Fermi level Conductivity Dielectric Variable-range hopping Thin film Electron Nanotechnology Composite material Chemistry Crystallography Thermal conduction Optoelectronics

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Structure and electrical conductivity of nanocomposite SiOxNy(Si) and SiAlzOxNy(Si) films

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