JOURNAL ARTICLE

Geometric structure of thin SiOxNy films on Si(100)

Keywords:
Coordination number X-ray photoelectron spectroscopy Amorphous solid Bond length Extended X-ray absorption fine structure Tetrahedron Thin film Atom (system on chip) Chemical vapor deposition Oxygen Molecular geometry Deposition (geology) Materials science Chemical bond Crystallography Analytical Chemistry (journal) Chemistry Crystal structure Nanotechnology Molecule Optics Absorption spectroscopy Nuclear magnetic resonance Physics

Metrics

24
Cited By
1.83
FWCI (Field Weighted Citation Impact)
13
Refs
0.83
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Electron and X-Ray Spectroscopy Techniques
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
X-ray Diffraction in Crystallography
Physical Sciences →  Materials Science →  Materials Chemistry
X-ray Spectroscopy and Fluorescence Analysis
Physical Sciences →  Physics and Astronomy →  Radiation

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