Different Beam Configurations for Compliant Mechanism-Based MEMS Accelerometer

Nikul Jani; Mithlesh Kumar; P. Krishna Menon; Ashok Kumar Pandey

doi:10.1007/978-3-031-20353-4_8

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Different Beam Configurations for Compliant Mechanism-Based MEMS Accelerometer

Nikul Jani Mithlesh Kumar P. Krishna Menon Ashok Kumar Pandey

Year: 2022 Mechanisms and machine science Pages: 119-135 Publisher: Springer Nature (Netherlands)

DOI: 10.1007/978-3-031-20353-4_8

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Keywords:

Accelerometer Microelectromechanical systems Amplifier Displacement (psychology) Proof mass Capacitive sensing Mechanism (biology) Compliant mechanism Beam (structure) Sensitivity (control systems) Gyroscope Electronic engineering Engineering Computer science Acoustics Structural engineering Materials science Physics Electrical engineering Optoelectronics Aerospace engineering CMOS Finite element method

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Piezoelectric Actuators and Control

Physical Sciences → Engineering → Control and Systems Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Different Beam Configurations for Compliant Mechanism-Based MEMS Accelerometer

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