JOURNAL ARTICLE
A Tri-axial Resonating Beam MEMS Accelerometer
Chinmay YadavS. RajuSujan Yenuganti
Year: 2024 Journal: Journal of Electrical Engineering and Technology Vol: 20 (1)Pages: 773-783 Publisher: Springer Science+Business Media
Keywords:
Accelerometer Multiphysics Microelectromechanical systems Acceleration Beam (structure) Acoustics Miniaturization Differential (mechanical device) Proof mass Physics Resonance (particle physics) Transducer Vibration Finite element method Engineering Electrical engineering Structural engineering Optics Optoelectronics Classical mechanics
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FWCI (Field Weighted Citation Impact)
25
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0.10
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Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
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