Force-Amplifying Compliant Mechanism for Closed-Loop MEMS Accelerometer

Nikul Jani; Sai Kishore Jujjuvarapu; P. Krishna Menon; Ashok Kumar Pandey

doi:10.1109/lsens.2024.3484527

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Force-Amplifying Compliant Mechanism for Closed-Loop MEMS Accelerometer

Nikul Jani Sai Kishore Jujjuvarapu P. Krishna Menon Ashok Kumar Pandey

Year: 2024 Journal: IEEE Sensors Letters Vol: 8 (12)Pages: 1-4 Publisher: Institute of Electrical and Electronics Engineers

DOI: 10.1109/lsens.2024.3484527

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Keywords:

Microelectromechanical systems Accelerometer Mechanism (biology) Closed loop Compliant mechanism Materials science Computer science Physics Engineering Control engineering Structural engineering Optoelectronics Finite element method

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Geophysics and Sensor Technology

Physical Sciences → Engineering → Ocean Engineering

Piezoelectric Actuators and Control

Physical Sciences → Engineering → Control and Systems Engineering

Force-Amplifying Compliant Mechanism for Closed-Loop MEMS Accelerometer

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