JOURNAL ARTICLE

Silicon trench etching made easy

Year: 1989 Journal:   Microelectronics Reliability Vol: 29 (6)Pages: 1101-1101   Publisher: Elsevier BV
Keywords:
Heat transfer enhancement Heat transfer Mechanics Materials science Convective heat transfer Heat transfer coefficient Tube (container) Trench Convection Flow (mathematics) Mechanical engineering Thermodynamics Composite material Engineering Physics

Metrics

1
Cited By
0.95
FWCI (Field Weighted Citation Impact)
0
Refs
0.83
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Heat Transfer and Optimization
Physical Sciences →  Engineering →  Mechanical Engineering
Heat Transfer and Boiling Studies
Physical Sciences →  Engineering →  Mechanical Engineering
Advancements in Semiconductor Devices and Circuit Design
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

Related Documents

JOURNAL ARTICLE

Deep trench etching in macroporous silicon

T. GeppertStefan L. SchweizerU. GöseleRalf B. Wehrspohn

Journal:   Applied Physics A Year: 2006 Vol: 84 (3)Pages: 237-242
JOURNAL ARTICLE

Characterization of BCl3 ‐ Cl2 Silicon Trench Etching

A. KassamC. MeadowcroftC.A.T. SalamaP. Ratnam

Journal:   Journal of The Electrochemical Society Year: 1990 Vol: 137 (5)Pages: 1613-1617
JOURNAL ARTICLE

Silicon Trench Etching by Electron Cyclotron Resonance Plasma

Yutaka EntaMuneo FuruseKazuo TakataTakashi Tsutsumi

Journal:   Journal of the Vacuum Society of Japan Year: 2010 Vol: 53 (7)Pages: 435-440
JOURNAL ARTICLE

Silicon trench etching in a multi-frequency discharge reactor

Š. Haščı́kA. HorniakováJ. Huran

Journal:   Vacuum Year: 1994 Vol: 45 (8)Pages: 915-917
© 2026 ScienceGate Book Chapters — All rights reserved.