Silicon trench etching made easy

doi:10.1016/0026-2714(89)90110-8

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JOURNAL ARTICLE

Silicon trench etching made easy

Year: 1989 Journal: Microelectronics Reliability Vol: 29 (6)Pages: 1101-1101 Publisher: Elsevier BV

DOI: 10.1016/0026-2714(89)90110-8

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Keywords:

Heat transfer enhancement Heat transfer Mechanics Materials science Convective heat transfer Heat transfer coefficient Tube (container) Trench Convection Flow (mathematics) Mechanical engineering Thermodynamics Composite material Engineering Physics

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Topics

Heat Transfer and Optimization

Physical Sciences → Engineering → Mechanical Engineering

Heat Transfer and Boiling Studies

Physical Sciences → Engineering → Mechanical Engineering

Advancements in Semiconductor Devices and Circuit Design

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon trench etching made easy

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