JOURNAL ARTICLE

Silicon trench etching in a multi-frequency discharge reactor

Keywords:
Trench Etching (microfabrication) Materials science Diode Optoelectronics Silicon Dry etching Reactive-ion etching Planar Oxide Core (optical fiber) Analytical Chemistry (journal) Composite material Chemistry Metallurgy

Metrics

6
Cited By
0.89
FWCI (Field Weighted Citation Impact)
1
Refs
0.74
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Plasma Diagnostics and Applications
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Plasma Applications and Diagnostics
Health Sciences →  Medicine →  Radiology, Nuclear Medicine and Imaging
Electrohydrodynamics and Fluid Dynamics
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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