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JOURNAL ARTICLE

Mechanical Properties of Ultrananocrystalline Diamond Thin Films Relevant to MEMS/NEMS Devices

Horacio D. Espinosa B. C. Prorok B. Peng K. H. Kim N. Moldovan Orlando Auciello John A. Carlisle D. M. Gruen Derrick C. Mancini

Year: 2003 Journal: Experimental Mechanics Vol: 43 (3)Pages: 256-268 Publisher: Springer Nature

DOI: 10.1177/00144851030433005

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Keywords:

Materials science Diamond Elastic modulus Composite material Cantilever Deflection (physics) Nanoelectromechanical systems Wafer Flexural strength Microelectromechanical systems Modulus Surface roughness Young's modulus Nanotechnology Optics Nanoparticle

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0.57

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Citation History

Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

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