JOURNAL ARTICLE

Mechanical Properties of Ultrananocrystalline Diamond Thin Films Relevant to MEMS/NEMS Devices

Keywords:
Materials science Diamond Elastic modulus Composite material Cantilever Deflection (physics) Nanoelectromechanical systems Wafer Flexural strength Microelectromechanical systems Modulus Surface roughness Young's modulus Nanotechnology Optics Nanoparticle

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Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering

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