JOURNAL ARTICLE

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

Keywords:
Microelectromechanical systems Materials science Diamond Flexural strength Tribology Brittleness Composite material Fracture toughness Nanotechnology Fabrication Silicon Surface micromachining Optoelectronics

Metrics

365
Cited By
8.95
FWCI (Field Weighted Citation Impact)
42
Refs
0.99
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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