Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

A.R. Krauss; Orlando Auciello; D. M. Gruen; Ahalapitiya H. Jayatissa; Anirudha V. Sumant; J. Tuček; Derrick C. Mancini; N. Moldovan; Ali Erdemir; Daniel Ersoy; Michael N. Gardos; H.‐G. Busmann; Eva-Maria Meyer; M.Q. Ding

doi:10.1016/s0925-9635(01)00385-5

JOURNAL ARTICLE

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

A.R. Krauss Orlando Auciello D. M. Gruen Ahalapitiya H. Jayatissa Anirudha V. Sumant J. Tuček Derrick C. Mancini N. Moldovan Ali Erdemir Daniel Ersoy Michael N. Gardos H.‐G. Busmann Eva-Maria Meyer M.Q. Ding

Year: 2001 Journal: Diamond and Related Materials Vol: 10 (11)Pages: 1952-1961 Publisher: Elsevier BV

DOI: 10.1016/s0925-9635(01)00385-5

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Keywords:

Microelectromechanical systems Materials science Diamond Flexural strength Tribology Brittleness Composite material Fracture toughness Nanotechnology Fabrication Silicon Surface micromachining Optoelectronics

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

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