JOURNAL ARTICLE

Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications

Keywords:
Materials science Microelectromechanical systems Diamond Deflection (physics) Composite material Fabrication Fracture toughness Nanotechnology Optics

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11
Cited By
0.47
FWCI (Field Weighted Citation Impact)
12
Refs
0.66
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Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials

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