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JOURNAL ARTICLE

Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications

Horacio D. Espinosa Bei Peng K. H. Kim Barton C. Prorok N. Moldovan X. Xiao J. E. Gerbi J. Birrell Orlando Auciello John A. Carlisle D. M. Gruen Derrick C. Mancini

Year: 2002 Journal: MRS Proceedings Vol: 741 Publisher: Cambridge University Press

DOI: 10.1557/proc-741-j9.2

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Keywords:

Materials science Microelectromechanical systems Diamond Deflection (physics) Composite material Fabrication Fracture toughness Nanotechnology Optics

Metrics

11

Cited By

0.47

FWCI (Field Weighted Citation Impact)

12

Refs

0.66

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

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