JOURNAL ARTICLE
Plasma etching of polysilicon: overview
Year: 1985 Journal: Microelectronics Reliability Vol: 25 (2)Pages: 394-394 Publisher: Elsevier BV
Keywords:
Rectifier (neural networks) Pulse-width modulation Electronic engineering Modulation (music) Etching (microfabrication) Hysteresis Electrical engineering Precision rectifier Engineering Computer science Materials science Physics Voltage Power factor Acoustics Nanotechnology
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Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
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