JOURNAL ARTICLE
Selective plasma etching of polysilicon
Year: 1984 Journal: Microelectronics Reliability Vol: 24 (6)Pages: 1101-1101 Publisher: Elsevier BV
Keywords:
Polysilicon depletion effect Etching (microfabrication) Materials science Plasma Plasma etching Optoelectronics Reactive-ion etching Electrical engineering Nanotechnology Engineering Transistor Physics Voltage Layer (electronics)
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Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Plasma Diagnostics and Applications
Physical Sciences → Engineering → Electrical and Electronic Engineering
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