JOURNAL ARTICLE

Selective plasma etching of polysilicon

Year: 1984 Journal:   Microelectronics Reliability Vol: 24 (6)Pages: 1101-1101   Publisher: Elsevier BV
Keywords:
Polysilicon depletion effect Etching (microfabrication) Materials science Plasma Plasma etching Optoelectronics Reactive-ion etching Electrical engineering Nanotechnology Engineering Transistor Physics Voltage Layer (electronics)

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Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Plasma Diagnostics and Applications
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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