Deposition of transparent and conductive oxide thin films by activated reactive evaporation

doi:10.1016/0042-207x(87)90350-2

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Deposition of transparent and conductive oxide thin films by activated reactive evaporation

Year: 1987 Journal: Vacuum Vol: 37 (5-6)Pages: 491-491 Publisher: Elsevier BV

DOI: 10.1016/0042-207x(87)90350-2

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Keywords:

Evaporation Deposition (geology) Materials science Thin film Oxide Chemical engineering Electrical conductor Transparent conducting film Nanotechnology Composite material Metallurgy Geology

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Catalytic Processes in Materials Science

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

nanoparticles nucleation surface interactions

Physical Sciences → Earth and Planetary Sciences → Atmospheric Science

Deposition of transparent and conductive oxide thin films by activated reactive evaporation

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