Characterization of transparent and conductive electrodes of indium tin oxide thin films by sequential reactive evaporation

M. Penza; S. Cozzi; M.A. Tagliente; L. Mirenghi; C. Martucci; A. Quirini

doi:10.1016/s0040-6090(99)00182-0

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Characterization of transparent and conductive electrodes of indium tin oxide thin films by sequential reactive evaporation

M. Penza S. Cozzi M.A. Tagliente L. Mirenghi C. Martucci A. Quirini

Year: 1999 Journal: Thin Solid Films Vol: 349 (1-2)Pages: 71-77 Publisher: Elsevier BV

DOI: 10.1016/s0040-6090(99)00182-0

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Keywords:

Materials science Annealing (glass) Indium tin oxide Thin film Electrode Electrical resistivity and conductivity Electrical conductor Transparent conducting film Evaporation Optoelectronics Indium Sheet resistance Optical transparency Tin oxide Layer (electronics) Nanotechnology Composite material Doping Chemistry Electrical engineering

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Characterization of transparent and conductive electrodes of indium tin oxide thin films by sequential reactive evaporation

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