MEMS/NEMS Devices and Applications

Darrin J. Young; Christian A. Zorman; Mehran Mehregany

doi:10.1007/978-3-540-29857-1_15

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MEMS/NEMS Devices and Applications

Darrin J. Young Christian A. Zorman Mehran Mehregany

Year: 2007 Pages: 415-442

DOI: 10.1007/978-3-540-29857-1_15

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Keywords:

Nanoelectromechanical systems Microelectromechanical systems Microfabrication Microscale chemistry Nanotechnology Engineering Integrated circuit Fabrication Materials science Computer science Electrical engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

MEMS/NEMS Devices and Applications

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